BROOKS AUTOMATION GMBH

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Patent Activity in the Last 10 Years

Technologies

Intl Class Technology Matters Rank in Class
 
  
 
B65G TRANSPORT OR STORAGE DEVICES, e.g. CONVEYERS FOR LOADING OR TIPPING; SHOP CONVEYER SYSTEMS; PNEUMATIC TUBE CONVEYERS 958
 
  
 
H01J ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS 3125
 
  
 
H01L SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR 3359
 
  
 
B25J MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES 157
 
  
 
B65D CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES 197
 
  
 
F16P SAFETY DEVICES IN GENERAL110
 
  
 
F24F AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING 144
 
  
 
F26B DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM 129
 
  
 
G05B CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS 1100
 
  
 
G06F ELECTRIC DIGITAL DATA PROCESSING 1446

Top Patents (by citation)

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Recent Publications

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Recent Patents

Patent # Title Filing Date Issue Date Intl Class
9889558 Redundantable robot assembly for workpiece transferAug 31, 15Feb 13, 18[H01L, G05B, B25J]
9728436 Transfer mechanism with multiple wafer handling capabilityOct 01, 12Aug 08, 17[H01L]
7232284 Device for loading substrates into and unloading them from a clean roomFeb 11, 99Jun 19, 07[B65G]
7134825 Device for handling substrates inside and outside a clean roomApr 13, 00Nov 14, 06[B65G]
6641348 Docking station for substrate transport containersNov 02, 98Nov 04, 03[B65G]
6419439 Indexer for magazine shelves of a magazine and wafer-shaped objects contained thereinJul 26, 96Jul 16, 02[H01J]
6418352 Integrated material management moduleDec 09, 98Jul 09, 02[G06F]
6403945 Device and method for detecting and distinguishing shelf-forming supports in cassettes and disk-shaped objects deposited thereonNov 02, 98Jun 11, 02[G06M]
6375403 Loading and unloading station for semiconductor processing installationsFeb 02, 00Apr 23, 02[B65G]
6211514 Device and method for sensing wafer-shaped objects and shelves in a containerAug 26, 97Apr 03, 01[H01J, B65G]

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Expired/Abandoned/Withdrawn Patents

Patent # Title Status Filing Date Issue/Pub Date Intl Class
6986636 Device for positioning disk-shaped objectsExpiredMay 10, 01Jan 17, 06[G06F]
6551049 Device for controlling the drive of mechanisms operating separately from one anotherExpiredJan 31, 01Apr 22, 03[B60P]
6510688 Safety device for a moving systemExpiredSep 22, 98Jan 28, 03[F15B]
6205881 Device for controlling the drive of mechanisms operating separately from one anotherExpiredOct 13, 98Mar 27, 01[B23Q]
6147356 Arrangement for the detection of disk-shaped objects in a cassetteExpiredMar 05, 99Nov 14, 00[G01N]
6099059 Device for the transfer of an object between at least two locationsExpiredSep 22, 98Aug 08, 00[B65G, B25J]
6068104 Device for securing a moving object at a destinationExpiredNov 26, 97May 30, 00[B65G]
6033175 Docking mechanism for aligning, coupling and securing a movable cart to a stationary workstationExpiredOct 13, 98Mar 07, 00[B60P]
5967740 Device for the transport of objects to a destinationExpiredNov 25, 97Oct 19, 99[B65G]
5814116 Arrangement for generating a purified, low-turbulence air flow for supplying local clean roomsExpiredJun 13, 96Sep 29, 98[B01D]
5807062 Arrangement for handling wafer-shaped objectsExpiredJun 13, 96Sep 15, 98[B65G]
5636724 Device for transferring a transport object between two end positionsExpiredMar 01, 95Jun 10, 97[B65G]

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